Zep520 On Sio2 For E-beam Lithography

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forzaclaudio

5th December 2007 - 04:59 PM

I was wondering if anyone knows if there is a way to enhance ZEP520 adhesion to SiO2? HMDS is not an option because this, in fact, make adhesion issues worse. Better adhesion is highly desirable because during wet etch of SiO2 using BHF 7:1 I have observed that etchant can flow between resist and SiO2 for large distances (couple of microns). Any suggestions?

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