guiding_light
14th September 2005 - 06:06 AM

After searching around a bit on the WWW, I found out
this much about the Imprio 250 from Molecular Imprints:
< 10 nm 3s overlay
26 mm X 32 mm field
as low as 2s/die
1000W Hg lamp
costs under 10 million USDSeems like a no-brainer to me, if I wanted to start making 20 nm structures with minimal budget in a developing or competing country today, I would have to use this kind of tool.
I'd probably trim down larger features to get 20 nm. Such techniques are already in use in semiconductor manufacturing today.
For tight squeeze spaces, I'd make the pattern in more than one sweep, sticking features in between previously patterned features. This technique has been published by several authors (
IBM,
U New Mexico) recently.
As I mentioned in an earlier post, it is important to get this part of the task of making smaller nanostructures out of the way, because the nanostructures themselves will or already have plenty of issues coming with them.
At least we may soon be able to position nanotubes and nanowires where we want them.