The Appropriate Use Of Euv (not Lithography)

guiding_light

1st June 2007 - 06:30 PM

http://www.physik.uni-kl.de/aeschlimann/pd...er_00000012.pdf

The presence of surface adsorbates on vacuum components can be directly detected by EUV photoemission spectroscopy. In the example given in the paper, it was oxygen on platinum. Surface reactions can be monitored directly as well.

guiding_light

1st June 2007 - 06:37 PM

In case the link becomes 404, the citation is:

"Direct Observation of Surface Chemistry Using Ultrafast Soft X-rays"
M. Bauer, C. Lei, K. Read, R. Tobey, J. Gland, M. M. Murnane, and H. C. Kapteyn

Physical Review Letters, volume 87, 025501 (2001).

Imagining a photoresist surface, shows how ridiculous EUV exposure in that situation would be.

guiding_light

2nd June 2007 - 09:54 AM

A similar paper here:

http://www.llnl.gov/tid/lof/documents/pdf/310411.pdf

Picosecond x-ray laser photoelectron spectroscopy of room temperature and heated materials

It's a Lawrence Livermore paper.

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