18th April 2009 - 08:27 PM
The semiconductor lithography industry has been oblivious to basic physics
for how long now with its pursuit of NGLs like EUV, E-beam, X-ray, etc.
20th April 2009 - 06:52 AM
Thirty years ago, it was reported that 5 eV electrons could go through 15 nm thick benzene fims. So this comes as no surprise.
J. Chem. Phys. 71, 4860 (1979).