guiding_light
13th April 2009 - 03:09 PM
QUOTE (20nmon+Apr 13 2009, 12:01 PM)
But how many electrons per square nm do we want?
depends what for. charge storage? lithography?
20nmon
14th April 2009 - 01:02 AM
I am pretty sure most of the exposure electrons at 8 uC/cm^2 are going through the resist. So I am concerned that not every square nanometer is exposed.
guiding_light
14th April 2009 - 03:07 AM
QUOTE (20nmon+Apr 14 2009, 01:02 AM)
I am pretty sure most of the exposure electrons at 8 uC/cm^2 are going through the resist. So I am concerned that not every square nanometer is exposed.
Yes, that is true.
Even with 10 photons or electrons per square nm, the film probably transmits at least 70%, leaving 3 randomly retained, which is hardly enough to alter the film within that small area. It means your feature width will not be well-defined on the nm-scale.
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