I am doing some validation of my model on Focused ion beam micromachining application. I am trying to make a trench shape with predefined geometry. However, the project partner (doing the experiment bit said they couldnt read the ion flux for me).
What I have got from them is the value of ion beam current (350pA), ion beam diameter (35nm), Beam energy (30 keV). Ga+ ion is used. Dwell time is 1 micro second. Is there a way/ formula to work out the ion flux from these information? or any sources/tutorial on the web for me to understand more the relationships among the parameters?
I have read a lot of paper. But most of them just pointed out the values of the parameters. However, since the lack of the details of ion flux. I am hanging on at a dead lock of my validation. Thanks for any infomation.