Hi, I am interested in patterning 30-40 nm features (holes), but my sample cannot be heated above 40 C. However, photoresist processing typically needs to go above this temperature. How can I get small features without having to heat the sample?
I'd suggest possibly inking. Blanket film processing generally uses high temperatures. But I don't know if 30-40 nm will be easy. If the surface adhesion exceeds the material cohesion (as it should otherwise it would ball up or detach), it's going to want to spread out.
QUOTE (guiding_light+Oct 13 2007, 05:22 AM)
I'd suggest possibly inking. Blanket film processing generally uses high temperatures. But I don't know if 30-40 nm will be easy. If the surface adhesion exceeds the material cohesion (as it should otherwise it would ball up or detach), it's going to want to spread out.
You mean something like dip pen? where can I find something like that?
You mean something like dip pen? where can I find something like that?
Can try NanoInk. 
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