To add comments or start new threads please go to the full version of: 193 Nm Photoresist Absorption
PhysOrgForum Science, Physics and Technology Discussion Forums > Technology > Silicon technology

guiding_light
http://www.jsrmicro.com/download/2000SPIEpaperPAG.pdf

Design and lithographic performances of 193-specific photoacid generators

Significant absorption starts at less than 5 eV photon energy.
guiding_light
see Figure 5.
PhysOrg scientific forums are totally dedicated to science, physics, and technology. Besides topical forums such as nanotechnology, quantum physics, silicon and III-V technology, applied physics, materials, space and others, you can also join our news and publications discussions. We also provide an off-topic forum category. If you need specific help on a scientific problem or have a question related to physics or technology, visit the PhysOrg Forums. Here you’ll find experts from various fields online every day.
To quit out of "lo-fi" mode and return to the regular forums, please click here.
©PhysOrg.com - physics and technology news - Version for PDAs